The entire processing part can be placed in a glove box for processing according to the needs
Configure nanosecond pulse width infrared fiber according to the needs of different scenarios(1064nm)Green light(532nm)Band light source; Picosecond pulse width infrared fiber(1064nm)Green light(532nm), UV(355nm)Band light source; Infrared fiber with femtosecond pulse width(1030nm)Green light(515nm)Band light sources are used for micro fine laser etching, marking, structural removal, slicing, surface peeling, and other applications.
Suitable for flexibilityPET/PI/PEN/Application of laser etching and marking on perovskite solar cells on glass and other substrate materials.
GlassPET、PI、PNTLaser etching of thin film materials on substrates, applied in industries such as touch screens, photovoltaic solar cells, and electrochromic glass.
Suitable for conductive silver pasteITO、FTOConductive metals such as zinc oxide, zirconium oxide, titanium oxide, nickel oxide, carbon powder, gold, silver, copper, aluminum, graphene, carbon nanotubes, oxides, perovskite cellsSpiro-OMeTAD、Perovskite、SnO2、C60、PCBMWaiting for material processing.Especially in the field of perovskite batteries, there are unique technical advantages in laser etching and marking technology for the cathode electrode, perovskite hole transport layer, barrier layer, perovskite layer, and anode electrode.
Adopting independently developed control software and directly importing itCADdataCCDCamera positioning automatic laser etching, easy to operate, convenient and fast; The design adopts real-time adjustment of the vibrating mirror, linear motor, and electric lifting worktable through software, combined with a vacuum adsorption tray device, which can effectively solve the smoothness of laser etching processing operation.
The equipment integrates advanced manufacturing technologies such as CNC technology, laser technology, software technology, etc., and has the characteristics of high flexibility, high precision, and high speed. It can perform precise and high-speed etching of various patterns and sizes on a large scale, and can ensure high production capacity. It is a reliable, stable, and high-performance cost-effective product.
Main components: laser, optical system, motion control system, electrical control system, positioning system, dust extraction system, vacuum adsorption system, marble gantry structure, sheet metal structural components, etc.
model |
Nanosecond infrared ET650MIR |
Nanosecond green lightET200MG |
Picosecond green light/ultraviolet ET300MPS |
Femtosecond infrared ET300IRFS |
Laboratory etching machine ET200MIR |
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laser device |
1064nm |
532nm |
532/355nm |
1030nm |
1064nm |
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wavelength/power |
20/30W |
5/10W |
10/15/30W |
20W |
20W |
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Processing dimensions |
100*100/200*200/300*300/400*300/600*600/600*900/700*1400mmoptional Customizable processing format |
110*110/140*140/ 200*200mmoptional |
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Laser frequency |
1-2000KHz |
30-150KHz |
1-1000KHz |
25-5000KHz |
1-2000KHz |
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galvanometer |
10/14mmOptical aperture |
10mmOptical aperture |
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focusing lenses |
40*40/70*70/110*110mmFormat (selected according to different application scenarios) |
100-200mmoptional |
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Beam expander |
2X |
8X/10X |
1.5X |
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focusing spot |
<30μm |
<30μm |
<10μm |
<50μm |
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Minimum line width |
<30μm |
<30μm |
<10μm |
<50μm |
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The coating material can be completely removed as needed, such asP4Edge cleaning treatment | |||||||||
Minimum line spacing |
<30μm |
<30μm |
<10μm |
<50μm |
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Precision of the whole machine |
±15μm |
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Applicable types |
Compatible with surface material treatment of flexible substrates and glass substrates |
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ZAxial motor stroke |
50mm(Automatic software control) |
hand movement500mm |
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Workbench positioning accuracy |
±3μm |
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Workbench repeatability accuracy |
±1μm |
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CCDCamera positioning accuracy |
±3μm |
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etching rate |
Maximum etching speed4000mm/s(Single line) |
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Equipment size/weight |
1200*1200*1700mm(200*200mmWithin the format make an appointment1000KgLarge size and dual light path 1550*1450*1750mm(600*600mmWithin the format make an appointment1800KgTelephone contact |
1050*700*1660mm(L*W*H) make an appointment300Kg |
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Equipment power consumption |
<2500W |
<3000W |
<1500W |
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Device file format |
standardCAD DXFfile |
DXF/PLT/JPGclass |
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contrast |
used forP1Conductive layerITO/FTOSingle layer material processing, some materials are engraved with multiple layers, especially for edge cleaning processing, which has a speed advantage |
Compared to nanosecond infrared, it canP1/P2/P3/ P4Etching and marking can be applied toITO/FTOPerovskite functional layer, metal/Etching and marking of carbon electrode layer |
Compared to nanosecond infrared, it canP1/P2/P3/ P4Etching and marking can be applied toITO/FTOPerovskite functional layer, metal/Etch and mark the carbon electrode layer. The advantage is that etching the next layer causes less damage to the previous layer, has less impact on the etching edge, and has a smaller volcanic crater |
Similar to picosecond pulse width band, choose according to different scenarios |
Only suitable for etching single-layer materials, can be customized with miniaturized product sizes according to needs100-200mm |
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Note: After mass production, multiple wavelength lasers are generally used in combination, and not a single machine is used to complete all film layer production. | |||||||||